JPH0418432U - - Google Patents
Info
- Publication number
- JPH0418432U JPH0418432U JP5992490U JP5992490U JPH0418432U JP H0418432 U JPH0418432 U JP H0418432U JP 5992490 U JP5992490 U JP 5992490U JP 5992490 U JP5992490 U JP 5992490U JP H0418432 U JPH0418432 U JP H0418432U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- semiconductor wafer
- rollers
- heat diffusion
- rotated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5992490U JPH0418432U (en]) | 1990-06-05 | 1990-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5992490U JPH0418432U (en]) | 1990-06-05 | 1990-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418432U true JPH0418432U (en]) | 1992-02-17 |
Family
ID=31586854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5992490U Pending JPH0418432U (en]) | 1990-06-05 | 1990-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418432U (en]) |
-
1990
- 1990-06-05 JP JP5992490U patent/JPH0418432U/ja active Pending